题目内容
电子束加工(EBM)与离子束(IBM)加工原理相同,但离子束具有更大的动能,依靠在极短时间内将动能转化为热能使材料局部熔化和气化来加工。
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电子束加工的特点是举办可聚集极高的能量密度和很小的斑点,能加工难以加工材料及热敏材料,能加工微细孔和窄缝,工件热变形小。
在超精密加工机床中,检测进给运动精度是采用( )
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